INTRODUCTION 1
PART Ⅰ:INFLUENCE OF SURFACE MORPHOLOGY AND MICROSTRUCTURE ON OPTICAL RESPONSE 9
CHARACTERIZATION OF SURFACE ROUGHNESS 9
1.1 Introduction 9
1.2 What Surface Roughness Is 10
1.3 How Surface Roughness Affects Optical Measurements 14
1.4 How Surface Roughness and Scattering Are Measured 14
1.5 Characterization of Selected Surfaces 20
1.6 Future Directions 23
CHARACTERIZATION OF THE NEAR-SURFACE REGION USING POLARIZATION-SENSITIVE OPTICAL TECHNIQUES 27
2.1 Introduction 27
2.2 Ellipsometry 29
Experimental Implementations of Ellipsometry 29
Analysis of Ellipsometry Data 32
2.3 Microstructural Determinations from Ellipsometry Data 34
Temperature Dependence of the Optical Properties of Silicon 34
Determination of the Optical Functions of Glasses Using SE 35
Spectroscopic Ellipsometry Studies of SiO2/Si 37
Spectroscopic Ellipsometry for Complicated Film Structures 38
Time-Resolved Ellipsometry 40
Single-Wavelength Real-Time Monitoring of Film Growth 41
Multiple-Wavelength Real-Time Monitoring of Film Growth 42
Infrared Ellipsometry Studies of Film Growth 44
THE COMPOSITION,STOICHIOMETRY,AND RELATED MICROSTRUCTURE OF OPTICAL MATERIALS 49
3.1 Introduction 49
3.2 Aspects of Raman Scattering 50
3.3 Ⅲ-Ⅴ Semiconductor Systems 51
3.4 Group Ⅳ Materials 56
3.5 Amorphous and Microcrystalline Semiconductors 59
Chalcogenide Glasses 60
Group Ⅳ Microcrystalline Semiconductors 63
3.6 Summary 66
DIAMOND AS AN OPTICAL MATERIAL 71
4.1 Introduction 71
4.2 Deposition Methods 72
4.3 Optical Properties of CVD Diamond 74
4.4 Defects in CVD Diamond 76
4.5 Polishing CVD Diamond 79
4.6 X-ray Window 80
4.7 Summary 81
PART Ⅱ:STABILITY AND MODIFICATION OF FILM AND SURFACE OPTICAL PROPERTIES 87
MULTILAYER OPTICAL COATINGS 87
5.1 Introduction 87
5.2 Single-Layer Optical Coatings 89
Optical Constants 90
Composition Measurement Techniques 91
5.3 Multilayer Optical Coatings 106
Compositional Analysis 107
Surface Analytical Techniques 108
Microstructural Analysis of Multilayer Optical Coatings 109
5.4 Stability of Multilayer Optical Coatings 111
5.5 Future Compositional and Microstructural Analytical Techniques 113
CHARACTERIZATION AND CONTROL OF STRESS IN OPTICAL FILMS 117
6.1 Introduction 117
6.2 Origins of Stress 119
6.3 Techniques for Modifying or Controlling Film Stress 124
Effect of Deposition Parameters 124
Effect of Ion-Assisted Deposition 127
Effect of Impurities 127
Effect of Post Deposition Annealing 128
6.4 Stress Measurement Techniques 130
Substrate Deformation 130
X-Ray Diffraction(XRD) 133
Raman Spectroscopy 134
6.5 Future Directions 136
SURFACE MODIFICATION OF OPTICAL MATERIALS 141
7.1 Introduction 141
7.2 Fundamental Processes 142
Ion-Solid Interactions 142
Defect Production,Rearrangement,and Retention 143
7.3 Ion Implantation of Some Optical Materials 145
Glasses and Amorphous Silica 145
α-Quartz(SiO2) 147
Halides 148
Sapphire(α-Al2O3) 149
LiNbO3 152
Preparation of Optical Components by Ion Implantation 153
LASER-INDUCED DAMAGE TO OPTICAL MATERIALS 157
8.1 Introduction 157
8.2 Laser Damage Definition and Statistics 158
Defining Damage 158
Collecting Damage Statistical Data 159
Types of Damage Probability Distributions 160
Identification of Pre-Damage Sites 160
Changing the Damage Threshold 161
8.3 In Situ Diagnostics 165
Photothermal Techniques 165
Particle Emission 168
8.4 Postmortem Diagnostics 170
Surface Charge State 170
Surface Phase and Structure Analysis 171
8.5 Future Directions 174
APPENDIX:TECHNIQUE SUMMARIES 181
1 Auger Electron Spectroscopy(AES) 181
2 Cathodoluminescence(CL) 182
3 Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope(EELS) 183
4 Energy-Dispersive X-Ray Spectroscopy(EDS) 184
5 Fourier Transform Infrared Spectroscopy(FTIR) 185
6 Light Microscopy 186
7 Modulation Spectroscopy 187
8 Nuclear Reaction Analysis(NRA) 188
9 Optical Scatterometry 189
10 Photoluminescence(PL) 190
11 Photothermal Displacement Technique 191
12 Raman Spectroscopy 193
13 Rutherford Backscattering Spectrometry(RBS) 194
14 Scanning Electron Microscopy(SEM) 195
15 Scanning Transmission Electron Microscopy(STEM) 196
16 Scanning Tunneling Microscopy and Scanning Force Microscopy(STM and SFM) 197
17 Static Secondary Ion Mass Spectrometry(Static SIMS) 198
18 Surface Roughness:Measurement,Formation by Sputtering,Impact on Depth Profiling 199
19 Total Internal Reflection Microscopy 200
20 Transmission Electron Microscopy(TEM) 202
21 Variable-Angle Spectroscopic Ellipsometry(VASE) 203
22 X-Ray Diffraction(XRD) 204
23 X-Ray Fluorescence(XRF) 205
24 X-Ray Photoelectron Spectroscopy(XPS) 206
Index 207