ULTRAHIGH VACUUM AND ITS APPLICATIONSPDF电子书下载

1 Ultrahigh Vacuum Technology 2

1-1 Introduction, 2

1-2 The History of Ultrahigh Vacuum Technology, 5

2 Ultrahigh Vacuum Components 7

2-1 Introduction, 8

2-2 Fundamental Vacuum System Con-siderations, 8

2-3 Pumps for Ultrahigh Vacuum, 10

2-4 Gauges for Ultrahigh Vacuum Measurement, 30

2-5 Bakeable Gauges for Pressures 10-5 Torr, 50

2-6 Valves for Ultrahigh Vacuum, 58

2-7 Accessories for Ultrahigh Vacuum, 62

3 Material of Construction 83

3-1 Introduction, 84

3-2 Glass, 95

3-3 Ceramic Refractory Materials, 105

3-4 Metals, 109

4 Ultrahigh Vacuum Systems 122

4-1 Introduction, 122

4-2 Assembly, 122

4-3 Typical Systems, 125

4-4 Leak Detection, 130

4-5 Operation, 131

5 Generation of Clean Surfaces 135

5-1 Introduction, 136

5-2 Evaporation, 137

5-3 High Temperature Heating of Bulk Metal, 142

5-4 Ion Bombardment （Sputtering） 143

5-5 Cleaving of Single Crystals, 144

5-6 Field Desorption, 145

6 Physical Properties of Surfaces 148

6-1 Introduction, 148

6-2 Thermionic and Field Emission from Surfaces, 148

6-3 Field Emission and Field Ion Mi-croscopes, 153

6-4 Low Energy Electron Diffraction, 157

6-5 Electron Emission by Ions and Electrons, 161

6-6 Flash Filament Experiments, 165

7 Miscellaneous Applications 174

7-1 Physical and Chemical Properties of Thin Films, 174

7-2 Boundary Lubrication of Metals, 177

7-3 Space Simulation, 179

Appendix-General References 186

A Ultrahigh Vacuum References, 186

B General Vacuum References, 186

C Journals, 187

Index 188

A Name Index, 189

B Subject Index, 193