《电子科学与技术专业英语 微电子技术分册》PDF下载

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  • 作  者:陈伟平,田丽主编(哈尔滨工业大学航天学院)
  • 出 版 社:哈尔滨:哈尔滨工业大学出版社
  • 出版年份:2007
  • ISBN:9787560318332
  • 页数:356 页
图书介绍:本书由半导体物理、半导体器件、半导体与集成电路工艺、集成电路设计和科技文献范例五部分组成。全书涵盖了微电子技术领域的基本内容,同时也介绍了该领域的一些较新的发展。

Chapter 1 Semiconductors Physics 1

1.1 Energy Bands and Carrier Concentration 1

1.2 Carrier Transport Phenomena 16

1.3 PN Junction 26

1.4 Summary 43

参考文献 64

Chapter 2 Semiconductor Device 65

2.1 Bipolar Junction Transistor 65

2.2 The MOSFET 87

2.3 Microwave and Photonic Devices 109

2.4 Summary 115

参考文献 138

Chapter 3 Processing Technology 139

3.1 Crystal Growth and Epitaxy 139

3.2 Crystal Growth from the Melt 140

3.3 Vaper-Phase Epitaxy 144

3.4 Oxidation and Film Deposition 147

3.5 Diffusion and Ion Implantation 151

3.6 Lithographies 158

3.7 Wet Chemical Etching 160

3.8 Dry Etching 164

3.9 Integrated Devices 167

3.10 Fundamental Limits of Integrated Devices 191

参考文献 198

Chapter 4 Integrated Circuits 199

4.1 Introduction 199

4.2 Design Analysis and Simulation 200

4.3 Verification 220

4.4 Summary 240

参考文献 241

Chapter 5 Microelectromechanical Systems(MEMS) 242

5.1 Introduction 242

5.2 MEMS 245

5.3 Mechanical Characteristics of Silicon 250

5.4 Microfabrications for MEMS 256

5.5 Microsensing for MEMS 272

5.6 Electromechanical Actuation 276

5.7 Materials for MEMS 277

参考文献 282

Chapter 6 Examples of Scientific and Technological Papers 283

6.1 The Challenges for Physical Limitations in Si Microelectronics 283

6.2 Microelectronics and Photonics-the Future 293

6.3 Accelerated Verification of Digital Devices Using VHDL 327

6.4 What Is Nanotechnology 346

参考文献 356