电子科学与技术专业英语 微电子技术分册PDF电子书下载

Chapter 1 Semiconductors Physics 1

1.1 Energy Bands and Carrier Concentration 1

1.2 Carrier Transport Phenomena 16

1.3 PN Junction 26

1.4 Summary 43

参考文献 64

Chapter 2 Semiconductor Device 65

2.1 Bipolar Junction Transistor 65

2.2 The MOSFET 87

2.3 Microwave and Photonic Devices 109

2.4 Summary 115

参考文献 138

Chapter 3 Processing Technology 139

3.1 Crystal Growth and Epitaxy 139

3.2 Crystal Growth from the Melt 140

3.3 Vaper-Phase Epitaxy 144

3.4 Oxidation and Film Deposition 147

3.5 Diffusion and Ion Implantation 151

3.6 Lithographies 158

3.7 Wet Chemical Etching 160

3.8 Dry Etching 164

3.9 Integrated Devices 167

3.10 Fundamental Limits of Integrated Devices 191

参考文献 198

Chapter 4 Integrated Circuits 199

4.1 Introduction 199

4.2 Design Analysis and Simulation 200

4.3 Verification 220

4.4 Summary 240

参考文献 241

Chapter 5 Microelectromechanical Systems(MEMS) 242

5.1 Introduction 242

5.2 MEMS 245

5.3 Mechanical Characteristics of Silicon 250

5.4 Microfabrications for MEMS 256

5.5 Microsensing for MEMS 272

5.6 Electromechanical Actuation 276

5.7 Materials for MEMS 277

参考文献 282

Chapter 6 Examples of Scientific and Technological Papers 283

6.1 The Challenges for Physical Limitations in Si Microelectronics 283

6.2 Microelectronics and Photonics-the Future 293

6.3 Accelerated Verification of Digital Devices Using VHDL 327

6.4 What Is Nanotechnology 346

参考文献 356