Chapter 1 Semiconductors Physics 1
1.1 Energy Bands and Carrier Concentration 1
1.2 Carrier Transport Phenomena 17
1.3 PN Junction 29
1.4 Summary 48
参考文献 72
Chapter 2 Semiconductor Device 73
2.1 Bipolar Junction Transistor 73
2.2 The MOSFET 98
2.3 Microwave and Photonic Devices 122
2.4 Summary 129
参考文献 156
Chapter 3 Processing Technology 157
3.1 Crystal Growth and Epitaxy 157
3.2 Crystal Growth from the Melt 158
3.3 Vaper-Phase Epitaxy 162
3.4 Oxidation and Film Deposition 165
3.5 Diffusion and Ion Implantation 171
3.6 Lithographies 178
3.7 Wet Chemical Etching 181
3.8 Dry Etching 185
3.9 Integrated Devices 188
3.10 Fundamental Limits of Integrated Devices 215
参考文献 223
Chapter 4 Integrated Circuits 224
4.1 Introduction 224
4.2 Design Analysis and Simulation 225
4.3 Verification 248
4.4 Summary 270
参考文献 272
Chapter 5 Microelectromechanical Systems(MEMS) 273
5.1 Introduction 273
5.2 MEMS 276
5.3 Mechanical Characteristics of Silicon 282
5.4 Microfabrications for MEMS 289
5.5 Microsensing for MEMS 306
5.6 Electromechanical Actuation 311
5.7 Materials for MEMS 312
参考文献 317
Chapter 6 Examples of Scientific and Technological Papers 318
6.1 The Challenges for Physical Limitations in Si Microelectronics 318
6.2 Microelectronics and Photonics-the Future 329
6.3 Accelerated Verification of Digital Devices Using VHDL 368
6.4 What Is Nanotechnology 390
参考文献 401