电子科学与技术专业英语 微电子技术分册PDF电子书下载

Chapter 1 Semiconductors Physics 1

1.1 Energy Bands and Carrier Concentration 1

1.2 Carrier Transport Phenomena 17

1.3 PN Junction 29

1.4 Summary 48

参考文献 72

Chapter 2 Semiconductor Device 73

2.1 Bipolar Junction Transistor 73

2.2 The MOSFET 98

2.3 Microwave and Photonic Devices 122

2.4 Summary 129

参考文献 156

Chapter 3 Processing Technology 157

3.1 Crystal Growth and Epitaxy 157

3.2 Crystal Growth from the Melt 158

3.3 Vaper-Phase Epitaxy 162

3.4 Oxidation and Film Deposition 165

3.5 Diffusion and Ion Implantation 171

3.6 Lithographies 178

3.7 Wet Chemical Etching 181

3.8 Dry Etching 185

3.9 Integrated Devices 188

3.10 Fundamental Limits of Integrated Devices 215

参考文献 223

Chapter 4 Integrated Circuits 224

4.1 Introduction 224

4.2 Design Analysis and Simulation 225

4.3 Verification 248

4.4 Summary 270

参考文献 272

Chapter 5 Microelectromechanical Systems(MEMS) 273

5.1 Introduction 273

5.2 MEMS 276

5.3 Mechanical Characteristics of Silicon 282

5.4 Microfabrications for MEMS 289

5.5 Microsensing for MEMS 306

5.6 Electromechanical Actuation 311

5.7 Materials for MEMS 312

参考文献 317

Chapter 6 Examples of Scientific and Technological Papers 318

6.1 The Challenges for Physical Limitations in Si Microelectronics 318

6.2 Microelectronics and Photonics-the Future 329

6.3 Accelerated Verification of Digital Devices Using VHDL 368

6.4 What Is Nanotechnology 390

参考文献 401